优异的电学、热学、机械特性和化学稳定性以及独特的一维纳米结构,使碳纳米管(CNT)成为应用在微纳电子器件中的理想功能材料.与传统电子器件相比,CNT微纳电子器件性能更为优异.本文综述了近年来制备和改进基于CNT的场发射器、晶体管和传感器的研究进展.经过特定方法的组装和处理,可使CNT场发射器获得低阀值电压、高发射电流和发射电流稳定等优异性能,使CNT晶体管具有高迁移率、大跨导和大电流开闭比,可提高各种CNT传感器的灵敏度.
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