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The uniform transparent TiO2/SiO2 photocatalytic composite thin films are prepared by sol-gel method on the soda lime glass substrates, and characterized by UV-visible spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), BET surface area, FTIR spectroscopy and X-ray photoelectron spectroscopy (XPS). It was found that the addition of SiO2 to TiO2 thin films can suppress the grain growth of TiO2 crystal, increase the hydroxyl content on the surface of TiO2 films, lower the contact angle for water on TiO2 films and enhance the hydrophilic property of TiO2 films. The super-hydrophilic TiO2/SiO2 photocatalytic composite thin films with the contact angle of 0-° are obtained by the addition of 10%-20% SiO2 in mole fraction.

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