介绍了探测器级 NTD 硅单晶的制作工艺,并对如何保证探测器级 NTD 硅单晶的质量进行了讨论。
The process to manufacture the NTD monocrystalline silicon for detectors was described, and the problem how to ensure its quality was discussed.
参考文献
[1] | 沃尔夫冈·凯勒 .固体材料的制备及性能[J].洛阳单晶硅厂技术情报档案科译,1984,109 |
[2] | 张洪川.硅材料学术会议[M].长沙,1986:421. |
[3] | 沈复初.硅材料学术会议[C].,1985:391. |
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