系统介绍了直拉重掺硼(B)硅单晶研究的最新进展.主要内容包括重掺B硅单晶的基本性质,利用重掺B籽晶进行无缩颈硅单晶生长技术,重掺B硅单晶的机械性能,重掺B硅单晶中的氧和氧沉淀,以及B的大量掺杂与大直径直拉硅单晶中空洞型(Void)原生缺陷的控制关系.在此基础上,探讨了当前直拉重掺B硅单晶生产和研究中存在的主要问题.
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