三氟乙酸盐-金属有机沉积技术(TFA-MOD)是制备钇钡铜氧涂层导体的有发展前景的方法之一.采用TFA-MOD技术在铝酸镧单晶基片上制备出YBa2Cu3O7-x涂层导体,并对不同烧结温度下制备的薄膜作了分析比较,找到了较为合适的烧结温度.用X射线衍射进行了物相的定性分析,由YBCO薄膜的(103)φ扫描图谱分析了薄膜的外延生长,用原子力显微镜观察了薄膜表面形貌.结果表明制备出的YBCO薄膜表面均匀致密、无明显裂纹、有较强的(00l)衍射峰.
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