为考察CIS薄膜太阳能电池Cu-In前驱膜结构相变规律, 采用电沉积法制备Cu-In前驱膜, 并对前驱膜进行真空退火热处理. 采用SEM和EDS观察并分析了薄膜的表面形貌和成分, 采用XRD表征薄膜组织结构. 结果表明, Cu-In前驱膜以CuIn, CuIn2和Cu混合相存在; 157 ℃真空退火10 min, 发生第一次相变生成Cu11In9相; 310 ℃真空退火10 min, 发生第二次相变生成Cu7In3相. 富Cu的Cu-In前驱膜结构相变受动力学边界条件所控制.
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