Φ200 mm CZSi复合式热场的数值模拟研究

稀有金属, 2008, 32(2): 161-164. doi: 10.3969/j.issn.0258-7076.2008.02.007

Φ200 mm CZSi复合式热场的数值模拟研究

任丙彦 ^1, , 李洪源 ^2, , 张燕 ^3, , 张兵 ^4, , 郭贝 ^5,

1.河北工业大学材料学院,天津,300130

2.河北工业大学材料学院,天津,300130

3.河北工业大学材料学院,天津,300130

4.河北工业大学材料学院,天津,300130

5.河北工业大学材料学院,天津,300130

基金项目: 国家自然科学基金(60576002)

关键词： CZSi , 热场 , 有限元 , 双加热器 , 热对流

Numerical Simulation of Composite Thermal Field in Φ 200 mm CZSi Crystal Growth

对国产TDR-80型单晶炉的复合式热场系统进行了优化设计, 建立了不同条件下的理论模型, 采用有限元数值模拟的方法分析了主加热器的延伸率、埚径比和熔体高度变化对直拉硅单晶生长中的温度梯度和热流密度分布的影响, 为提高晶体生长速率和质量提供了必要的理论依据.

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材料期刊网

Φ200 mm CZSi复合式热场的数值模拟研究

Numerical Simulation of Composite Thermal Field in Φ 200 mm CZSi Crystal Growth

参考文献