利用磁控溅射在柔性基底上制备了大面积的TiO2/Ag/Ti/TiO2多层膜, 其中TiO2和Ag分别采用中频反应溅射和直流磁控溅射制备, 同时采用Ti作为过渡层, 有效地防止了在溅射最外层TiO2时对Ag膜连续性的破坏.利用紫外可见分光光度计, 四探针电阻仪, 扫描电子显微镜, 红外比辐射率测量仪对薄膜的表面形貌和光电特性进行了表征, 重点研究了不同膜层厚度对多层膜可见光透过率, 方块电阻和红外发射率的影响.结果表明, Ag层厚度对多层膜的方块电阻和红外发射率有决定性的影响, 而TiO2层厚度对此影响不大.
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