采用三氟乙酸盐-金属有机沉积(TFA-MOD)法在LaAlO3单晶基体上成功地制备了YBa2Cu3O7-x超导薄膜(简称YBCO薄膜),并比较系统地研究了烧结温度对YBCO薄膜的影响.在烧结温度为820℃时,所制备的YBCO薄膜完全呈c-轴取向,无α-轴取向的晶粒和杂质相存在,YBCO薄膜的表面无裂纹存在,表面平整,超导转变温度Tc≈90 K,转变宽度△Tc=1 K,临界电流密度(Jc)可达1.2MA·cm-2(77K,0T).
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