使用磁控溅射方法制备了一系列Tb-Co2FeAl磁性薄膜,研究了两种不同溅射功率以及不同的薄膜厚度对样品的磁性的影响.采用交变梯度磁强计(AGM)对样品磁性能进行表征.结果显示,当Tb靶和CO2FeAl靶的溅射功率分别为5和15 W时,同时表现出平面内各向异性及弱垂直各向异性;而当功率分别为10和30 W时则表现出强垂直磁各向异性,垂直矫顽力Hc=3.3×104 A·m-1,且垂直矫顽力的值随着薄膜厚度降低也逐渐减小,当厚度减小到10 nm时,Hc=1×104A·m-1.
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