研究了Ir/IrO_2微平面电极在低碳醇氧化电极表面的pH-E_(ocp)(pH-开路电位)关系,测量了几种低碳醇在电化学氧化过程中距离电极表面50 μm以内的不同距离处的pH值,对不同低碳醇电化学氧化产生的酸强度进行了比较与分析;Ir/IrO_2微平面电极的pH-E_(ocp)关系曲线与"醇-羧酸"体系种类有关;乙二醇在电化学氧化过程中产生的pH值最低,甲醇次之,乙醇产生的pH值最高,在500 nm处的稳态pH值分别为0.191、1.13和2.99. 通过向电解液中加入NaF,考察了生成的H~+和F~-结合对金属钛选择性微区刻蚀作用,在乙二醇为前驱体的体系中微孔刻蚀加工速率约为30 nm/min.
"pH-open circuit potential" relationship was investigated for Ir/IrO_2 micro plane pH sensing electrode on the primary alcohols oxidizing electrode surface. pH value at a distance apart from oxidizing electrode surface within 50 μm was measured during electrochemical oxidation of three primary alcohols. Comparison and analysis were made for the H~+ concentration generated by electrochemical oxidation of the primary alcohols. The experiment reveals that the relationship between "pH-open circuit potential" of the Ir/ IrO_2 micro plane electrode is related to the kind of "alcohol-carboxylic acid" system. The H~+ concentration generated by electrochemical oxidation of glycol is the highest, methanol's comes the second, and ethanol's is the lowest. Under steady state diffusion, their pH values were 0. 191, 1. 13 and 2. 99 at 500 nm from oxidizing electrode surface respectivly. Through the addition of NaF in the electrolyte, the selective micro-area etching function of HF formed by the association of H~+ and F~- for titanium was examined. In the glycol oxidation system, the etching rate for microhole on titanium was about 30 nm/min.
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