用脉冲激光淀积制备具有光滑表面的A-轴取向YBa2Cu3O7薄膜

1.中国科学院物理研究所光物理实验室,北京,100080

2.中国科学院物理研究所光物理实验室,北京,100080

3.中国科学院物理研究所光物理实验室,北京,100080

4.中国科学院物理研究所光物理实验室,北京,100080

5.中国科学院物理研究所光物理实验室,北京,100080

FABRICATION OF A-AXIS ORIENTED YBa2Cu3O7 THIN FILMS WITH SMOOTH SURFACE BY PULSED LASER DEPOSITION

我们采用脉冲激光淀积方法在(100)SrTiO3基底上制备了a-轴取向外延的YBa2Cu3O7-x薄膜.通过采用活性氧,降低氧压和淀积速率,制备出了Tc超过80K、表面平均粗糙度为4.43nm的薄膜.X-射线衍射谱表明,实验得到的YBa2Cu3O7-x外延薄膜是高度A-轴取向的.

[1]	Z Trajanovic;I Takeuchi et al.[J].Applied Physics Letters,1995,66(12):1536.
[2]	Masashi Mukaida .[J].Japanese Journal of Applied Physics,1997,36:L767.
[3]	Masashi Mukaida;Shintaro Miyazawa .[J].Journal of Applied Physics,1993,74(02):1209.
[4]	J Gao;T L Cheng .[J].Superconductor Science and Technology,1998,11:278.
[5]	T Nagano;T Hashimoto;J Yoshida .[J].Physica C,1996,265:214.
[6]	S Hontsu;N Mukai;J Ishii .[J].Applied Physics Letters,1992,61(09):1134.
[7]	W Ito;Y Yoshida;S Mahajan;T.Mortishita .[J].Physica C,1994,227:313.
[8]	J Gao;L P Guo et al.[J].Journal of Materials Science,1996,31:5609.
[9]	M Konishi;J G Wen et al.[J].Journal of Crystal Growth,1997,79:451.
[10]	Kazuya Kinoshita;Hiroshige Ishibashi et al.[J].Japanese Journal of Applied Physics,1994,33:L417.
[11]	K H Wu;S P Chen et al.[J].Physica C,1997,289:230.
[12]	D Chambonnet;D Keller;C Belouet .[J].Physica C,1998,302:198.
[13]	B Dam;J H Rector et al.[J].Physica C,1998,296:179.
[14]	J Z Liu;L Li .[J].Physica C,1997,282-287:549.

上一张下一张

计量

作者相关

文章评分