本文报导用磁控离子溅射和后热处理方法在LaAlO3(001)衬底上制作2英寸双面Tl2Ba2CaCu2O8(Tl-2212) 超导薄膜的方法和薄膜的特性.XRD测试表明薄膜具有纯的Tl-2212相和c轴垂直于膜面的织构.衬底两侧薄膜的结晶形貌和超导电性均匀,超导转变温度Tc一般为105 K左右,液氮温度下临界电流密度Jc>2×106A/cm2,10GHz频率下表面电阻最小达到350μΩ,可满足超导微波滤波器实用的需要.
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