具有择尤取向的薄膜材料因弹性呈现各向异性，在利用X射线衍射法测定薄膜残余应力时，常发生d-sin2ψ测试曲线的非线性振荡，无法得到准确的应力值。本文利用Voigt、Reuss和Kroner模型计算了TiN薄膜的弹性常数随ψ角的分布在低ψ角区发生的弯曲。与实测PVD TiN薄膜的应力测试曲线的弯曲情况相似，说明丝织构的确可能造成薄膜应力测试d-sin2ψ曲线的低ψ角弯曲。
The preferred orientation of thin films led to oscillation of the measured d- sin2 ψ curve when the residual stresses of films were measured using X-ray diffraction. The distribution of elastic constants of TiN film vs.ψ angle was calculated using Voigt, Reuss and Kroner models. The result shows that the distribution of the elastic constants of TiN film shows curved in the range of the small ψ angle which is similitude to that of the measured d-sin2 ψcurve. It illuminates that the fiber texture can certainly make the d-sin2 ψ curve not show linear.
参考文献
| [1] | Noyan I C;Cohen J B.Residual stress--Measurement by Diffraction and Interpretation[M].New York Springer-Verlag New York Inc,1987 |
| [2] | Perry A J .Anomalies in the lattice parameters and residual stress of coatings made by physical vapor deposition methods[J].Surface and Coatings Technology,1990,41:231-241. |
| [3] | Perry A J;Jagner M;Sproul W D et al.Residual stress and strain distribution anomalies in TiN films deposited by physical vapor deposition[J].Surface and Coatings Technology,1990,42:49-68. |
| [4] | 佐佐木敏彦;仓元真富;吉冈靖夫 .湾曲したsin2ψ线图を有する材料のX线的弹性定数测定法及ぴZn-Ni合金电气めつきつの适用[J].非破坏检查(日本),1990,39(08):660-665. |
| [5] | Dolle H;Hauk V .Einfluss der mechanischen anisotropie des vielkristalls (Texture) auf die rontgenographische spannungsermittlung[J].Zeitschrift fur Metallkunde,1978(69):410. |
| [6] | Voigt W.Lehrburch der Kristall Phisik[M].Nachdruck Berlin/Leibzig:1 Auflage Teubuer,1928 |
| [7] | Reuss A .Berechung der fliessgrenze von mischkristalle auf ground der plastizitatsbedigung fur einkristalle[J].Z Angew Math und Mech,1929,9:49. |
| [8] | Eshelby J P .The determination of the elastic field of an ellipsoidal inclusion and relation problems[J].Proceedings of the Royal Society of London,1957,A241:376-396. |
| [9] | Kroner E .Berechnumg der elastischen konstanten des vielkuistalls ans den konstanten des einkristalls[J].Zeitschrift für Physik,1958,151:504-518. |
| [10] | Keer G.Uber die berechnung der Elatizitatsmoduln vielkristalliner aggregate mit texture[J].Physica Status Solidi,1965(09):825-838. |
| [11] | HILLR .Elastic properties of reinforced solids some theoretical principles[J].Journal of the Mechanics and Physics of Solids,1963,11:357-372. |
| [12] | Kress W .Phonon anomalies in transition- metal nitride:TiN[J].Physical Review B,1978,17:111. |
| [13] | Richerby D S .Internal stress in titanium nitride coatings:modeling of complex stress systems[J].Surface and Coatings Technology,1988,36:661. |
| [14] | Fillit R Y;Perry A J .Residual stress and X-ray elastic constants in highly textured physical vapor deposited coatings[J].Surface and Coatings Technology,1988,36:647-659. |
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