基于薄膜/基体界面结合强度对膜基体系的使用效果有直接影响,采用压痕法测定了1Cr18Ni9Ti钢基材表面物理气相沉积铜薄膜的界面结合强度,并通过分析界面处的受力情况,建立相应的数学模型计算出界面结合力.
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