随着微型机械、高密度磁记录技术的发展,其器件的润滑及磨损成为制约其发展的一个关键问题.纳米复合薄膜有望解决这一问题.对化学法制备纳米复合薄膜的方法进行了综述,重点对分子沉积膜的发展及应用进行了概述,提出了分子沉积膜今后的发展趋势.
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