设计和制备了用于平面显示器透明电极的纳米多层薄膜TiO2/Ag/TiO2,它的明视透光率Tlum约为89.3%,在2 500nm波长处的反射率R2 500>95%,方块电阻为3.0Ω/cm2,在550nm波长处的电气性能评价指标FTC=137×10-3Ω-1.发现顶层介质折射率的变化将会引起膜系透射峰的水平移动,而底层介质折射率的变化将仅仅影响膜系透射峰的高低.
参考文献
[1] | M. Bender;W. Seelig;C. Daube;H. Frankenberger;B. Ocker;J. Stollenwerk .Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(1/2):72-77. |
[2] | Bellingham J R;Phillips W A .Intrinsic performance lim its in transparent conducting oxides[J].Journal of Materials Science Letters,1992,11:263-265. |
[3] | Bender M;Seeling W;Daube C et al.Dependence of film composition and thickness on optical and electrical properties of ITO-metal-ITO multilayers[J].Thin Solid Films,1998,326:67-71. |
[4] | A. Kloppel;W. Kriegseis;B. K. Meyer;A. Scharmann;C. Daube;J. Stollenwerk;J. Trube .Dependence of the electrical and optical behaviour of ITO-silver-ITO multilayers on the silver properties[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1):139-146. |
[5] | M. Fahland;P. Karlsson;C. Charton .Low resistivity transparent electrodes for displays on polymer substrates[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(2):334-337. |
[6] | Liu Xuanjie;Cai Xun;Mao Jifang .ZnS/Ag/ZnS nano-mutilayer films for transparent electrodes in flat display application[J].Applied Surface Science,2001,183:103-110. |
[7] | 林永昌;卢维强.光学薄膜原理[M].北京:国防工业出版社,1990 |
[8] | 汤顺青.色度学[M].北京:北京理工大学出版社,1990 |
[9] | Haacke G .The evaluation of transparent conductive films[J].Journal of Applied Physics,1973,44:4618. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%