研究了CVD金刚石膜氧化行为与断裂强度的关系.试验结果表明:CVD金刚石膜随着高温氧化时间延长,其断裂强度不断下降;同样,随氧化温度的增高,断裂强度急剧降低.但在780℃氧化20min以内,或在810℃氧化10min以内,对金刚石膜的强度没有明显的影响.晶界的优先氧化所造成材料连续性的降低是高温下导致金刚石膜强度降低的主要原因.
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