用一种新型的等离子体浸没式离子注入技术(PIII),在Cr12MoV钢基体上制备了TiN膜,经XPS分析发现,膜中的组织为TiN、TiO2和Ti2O3.对有与无TiN膜的Cr12MoV钢试样进行对比,测定了维氏硬度,耐磨性以及磨痕.结果表明:TiN膜具有高的硬度和优良的抗摩擦性能.
参考文献
| [1] | RossiS;Fedrizzi L;Leoni M et al.(Ti,Cr) N and Ti/TiN PVD coatings on 304 stainless steel substrates:wear-corrosion behavior[J].Thin Solid Films,1999,350:161-167. |
| [2] | MunzWD;Hofmann D;Hartig K A .High rate sputtering process for the fomation of hard friction-reducing TiN coatings on tools[J].THIN SOLID FILMS,1982,96:79-87. |
| [3] | LeoniM;Scardi P;Rossi S et al.(Ti,Cr)N and Ti/TiN PVD coatings on 304 stainless steel substarates:texture and residual stress[J].Thin Solid Films,1999,345:263-269. |
| [4] | 李世直.用PCVD技术沉积TiN涂层的研究[J].金属热处理,1987(11):7-10. |
| [5] | Igasakiy;Mitsuhahi H .The effects of substrate bias on the structural and electrical properties of TiN films prepared by reactive R.F.sputtering deposition[J].Thin Solid Films,1980,70:17-24. |
| [6] | HuangNan;Chen yuanru;Cai Guangjun .Research on the fatigue behavior of titanium based biomaterial coated with titanium nitride film by ion beam enhanced deposition[J].Surface and Coatings Technology,1996,88:127-131. |
| [7] | WoltGK .Modification of chemical properties of materials by ion beam mixing and ion beam assisted deposition[J].Journal of Vacuum Science and Technology A,1992,A10(04):1757-1763. |
| [8] | 王钧石;陈元儒;刘阳 .38CrMoAl钢等离子体源离子注入表面改性研究[J].机械工程材料,1998,22(03):25-27. |
| [9] | 王钧石,陈元儒,尚赛男,柳襄杯,王曦,桐洪辉.GCr 1 5钢等离子体源离子注入表面改性[J].机械工程材料,2001(09):22-24. |
| [10] | ConradJR .Plasma source ion implantation:A New approach to ion beam modification of materials[J].Materials Science and Engineering,1989,A116:197-203. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%