高质量CVD金刚石膜的高温损伤的研究是其高温应用的基础。抛光的金刚石膜经780℃保温3min后，红外透过和可见光的透过率开始下降；780℃保温15min后，其红外透过和可见光的透过率严重受损。扫描电镜、原子力学显微镜及台阶仪的结果表明：CVD金刚石膜氧化的开始阶段主要集中在晶界、表面孔洞等缺陷处，随后导致金刚石膜的晶面也开始刻蚀，表面粗糙度增大，最终使得金刚石膜丧失红外和可见光的透过。
Studies of the oxidative degradation of high quality diamond have been conducted to better define the limits of application at high temperature.The infrared(IR)and visible optical performance of polished chemical vapor deposition (CVD) diamond films were degraded seriously after heating at 780℃ for 15min,while heating at 780℃ for 3 min produced a little change .Microscopic etched features were revealed by scanning electron microscopy(SEM),atomic force microscopy (AFM),and Talystep surface profiles.Many of the etched features are concentrated at a variety of defects including grain boundaries,surface porosity etc. The results of heating are increasing the surface roughness of CVD diamond films and degradation of the infrared transmittance.
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