讨论了液相外延法制备LiNbO3薄膜过程中,衬底和助熔剂的选择对LiNbO3薄膜制备的影响及掺杂改性问题,简要地介绍了LiNbO3薄膜的一些性能及光学应用.研究表明,目前可用液相外延法在LiTaO3、掺镁(5mol%)的同成分LiNbO3及纯的同成分或近化学计量比LiNbO3单晶衬底上制备出具有较高光学质量的LiNbO3薄膜.讨论了液相外延法制备LiNbO3薄膜过程中存在的主要问题、发展前景及今后的研究方向.
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