随着深紫外光刻技术的发展,透光范围宽、透过率高的CaF2晶体成了人们关注的焦点,其尺寸和质量得到了不断的提高.结合CaF2的基本性质,综述了CaF2晶体的主要生长方法及存在的问题.从原料的纯化处理到晶体的光学加工,归纳总结了提高紫外级CaF2晶体的尺寸、质量和产率的有效措施.
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