采用金属有机分解法(MOD)在p型Si(111)衬底上制备了K0.5Bi0.5TiO3(KBT)薄膜.用X射线衍射技术研究了薄膜的结构和结晶性.同时还研究了薄膜的绝缘性和存储性能.结果发现在740°C下退火4min的KBT薄膜呈钙钛矿结构;在0～8V范围内,薄膜的漏电流小于1.5×10-9A;在-12～+8V的偏压范围内,C-V记忆窗口宽度为10V.
参考文献
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