扫描电子显微镜是对人工欧泊光子晶体进行形貌观察、研究的重要手段.本文利用扫描电子显微镜对人工欧泊晶体及其填充InP后的形貌进行了分析.结果发现,二氧化硅微球短程有序而在较大的区域则出现台阶、空位和失配等缺陷;在选定生长条件下,InP在SiO2球空隙间具有较高的填充率和较好的结晶质量.此项研究为制备三维InP光子晶体提供了科学依据.
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