采用蒙特卡罗方法,对以CH4/H2混合气体为源气体的EACVD中的氢原子发射过程进行了模拟.研究了不同实验条件下产生的H、CH3的数目与氢原子谱线相对强度的关系,给出了一种利用氢原子谱线来获得最佳成膜实验条件的方法.本工作对于有效控制工艺条件,生长出高质量的金刚石薄膜具有重要意义.
参考文献
| [1] | 叶健松,胡晓君.超薄膜外延生长的Monte Carlo模拟[J].物理学报,2002(05):1108-1112. |
| [2] | 刘存业,刘畅.CVD金刚石膜的结构分析[J].物理学报,2003(06):1479-1483. |
| [3] | 谢峰,王晓平,石勤伟,赵特秀.Monte Carlo simulation of the effect of atomic diagonal transition on cluster diffusion[J].中国物理(英文版),2003(07):778-784. |
| [4] | Hsu L W .Mole Fraction of H,CH3 ,and Other Species during Filaments-assisted Diamond Growth[J].Applied Physics Letters,1991,59:1427. |
| [5] | Celii F G;Pehresson P E;Wang H T et al.Infrared Detection of Gaseous Species during the Filament-assisted Growth of Diamond[J].Applied Physics Letters,1988,52:2043. |
| [6] | 崔景彪;方容川 .金刚石膜生长过程原位光发射谱研究[J].物理化学学报,1996,12(02):102. |
| [7] | Dong L F;Zhang Y H;Ma B Q;Fu G S .Monte Carlo Simulation of Spatial Distribution of Atomic Hydrogen in Electron Assisted CVD[J].Diamond and Related Materials,2002,11:1648. |
| [8] | Dong L F;Chen J Y;Li X W et al.Dissociation Process of CH4/H2 Gas Mixture during EACVD[J].Thin Solid Films,2001,390:93. |
| [9] | Yarbrough W A;Tankala K;Mecray M et al.Hydrogen Assisted Heat Transfer during Diamond Growth Using Carbon and Tantalum Filaments[J].Applied Physics Letters,1992,60:2068. |
| [10] | SAELEE H T;Lucas J .Simulation of Electron Swarm Motion in Hydrogen and Carbon Monoxide for High E/N[J].Journal of Physics D:Applied Physics,1977,10:343. |
| [11] | Shigesato Y;Boekenhauer R E;Sheldon B W .Emission Spectroscopy during Direct-current-biased,Microwave-plasma Chemical Vapor Deposition of Diamond[J].Applied Physics Letters,1993,63:314. |
| [12] | Fu GS;Wang XH;Yu W;Han L;Dong LF;Li XW .Textured diamond films growth on (100) silicon via electron-assisted hot filament chemical vapor deposition[J].Applied physics letters,1997(15):1965-1967. |
| [13] | Kim Y K;Han Y S;Lee J Y .The Effects of a Negative Bias on the Nucleation of Oriented Diamond on Si[J].Diamond and Related Materials,1998,7:96. |
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