采用对靶直流磁控溅射制备的铁镍氧化物薄膜,其电特性、电化学特性和结构与反应溅射过程中氧氩比之间有很大的关系.实验结果表明氧气流量较高时,材料的导电性较好,但过电位较大;反之氧流量较低时,电阻率较大,过电位较小,表面较粗糙.
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