采用金属有机分解法(MOD)在p-Si(111)衬底上制备了钛酸铜钙(CaCu3Ti4O12)薄膜.对前驱体溶液粉体退火后做了红外和X射线分析;对薄膜退火后做了X射线和原子力显微镜分析.结果表明,在空气中750℃退火1h后,钛酸铜钙结晶良好;钛酸铜钙薄膜的生长为二维生长模式.
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