研究了利用钡、锶的碳酸盐代替醋酸盐作原料,采用新的Sol-gel技术制备Ba1-xSrxTiO3(BST)铁电薄膜的技术.采用碳酸钡、碳酸锶和钛酸四丁酯作原料配制BST溶胶;通过TG/DTA分析确定了BST薄膜的制膜工艺;使用XRD、SEM、AFM技术分析了薄膜的微结构.研究结果表明,采用碳酸盐作为钡、锶的原料,用冰醋酸和乙二醇甲醚混合液作溶剂,可配制出澄清透明、能长时间放置的溶胶,用此溶胶制备出了膜厚均匀、表面光洁致密、没有裂纹的全钙钛矿相的BST薄膜;采用扫描探针显微镜的压电响应模式(PFM)观察到了BST薄膜中的具有纳米结构的a畴和c畴.
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