薄膜(涂层)同基体材料的力学性能有很大差异,同时,由于其厚度薄,且其与界面和基体材料间的交互作用影响其力学性能测试中应力、应变的分布与传递,常规的拉伸、冲击等方法对其不再适用.列举了薄膜(涂层)硬度测试中的一些问题,着重讨论了基底和膜基界面、压头形状、隆起和凹陷现象、初始零位确定、弹性恢复以及表面粗糙度对薄膜(涂层)硬度测试的影响,并提出了相应改进措施.结果表明,只有综合考虑各个影响因素,才能获得薄膜(深层)的本征硬度.
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