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  4. 物理气相沉积TiN多元涂层和多层涂层的研究进展

材料保护, 2001, 34(10): 24-27. doi: 10.3969/j.issn.1001-1560.2001.10.011

物理气相沉积TiN多元涂层和多层涂层的研究进展

胡树兵 1, , 崔崑 2,

1.华中科技大学材料科学与工程学院,

2.华中科技大学材料科学与工程学院,

基金项目:   华中科技大学校科研和教改项目(98-13)   湖北省教育厅科研项目(99C019)  

关键词： TiN , 多元涂层 , 多层涂层

Research Development of Physicai Vapor Deposition TiN Multi-Component Coating and Multilayer Coating

综述了近年来物理气相沉积TiN多元涂层和多层涂层的研究,并指出通过合理的多元和多层涂层设计,TiN多元涂层和多层涂层能克服单一TiN涂层的不足,综合不同组元和不同单层的优势,从而获得优良的结合强度、硬度、耐磨性和高温性能,是今后物理气相沉积技术极有潜力的发展方向之一.

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