采用自组装成膜技术制备Y2O3薄膜.利用XPS、XRD和AFM分析表征了薄膜的组成和结构.结果发现淀积在基片上的Y2O3薄膜比较致密、均匀且牢固性好.摩擦磨损实验表明:利用该方法制备的Y2O3薄膜经600℃烧结处理后适于在低负荷、低滑动速度下作为减摩、抗磨保护性涂层.
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