TiN和TiC同属于NaCl形式的晶体结构,是同构互溶性的.Ti(C,N)是两者的固溶体.TiN和TiC及Ti(C,N)涂层具有优良的力学和摩擦学性能,作为硬质耐磨涂层,已用于切削刀具、钻头和模具等场合,具有广泛的应用前景.综述了国内外关于这3种涂层的研究成果.研究了影响其性能的若干因素,比较了它们的性能差异,为进一步优化涂层的性能及合理地选用涂层提供了参考.进一步的研究方向是高、低温及恶劣环境下涂层的性能以及更大载荷下涂层的摩擦学性能等.一些重要结果如下:(1)对TiN涂层而言,用CAPD比用CAIP制备时,涂层的摩擦因数小、结合强度大、硬度小;脉冲电压从550 V增大到750 V时,涂层脆性增加、结合强度减小;在多弧离子镀工艺中,500 ℃是最佳沉积温度,此时涂层的硬度和结合强度均最大.(2)对用反应磁控溅射制备的TiC涂层而言,用C2H2比用CH4制备时,涂层的硬度大;CH4分压在0.02～0.04 Pa范围内为最佳,此时TiC涂层的硬度和弹性模量最大,分别是30.9 GPa和343.0 GPa.(3)对Ti(C,N)涂层而言,随CH4:N2或C2H2:N2流量比的增大,其硬度增大;CH4:N2分压比对摩擦因数和磨损量的影响还与载荷的大小有关;TiCxN1-x涂层的硬度和弹性模量随x值而变化,当x为0.6左右时,硬度取最大值45 GPa,当x值为0.43左右时,弹性模量取最大值630 GPa.
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