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本文综述了压电材料在声表面波器件中的应用,分别介绍了压电单晶、压电陶瓷、压电薄膜等基片在SAW器件中的发展进程及其各自的特点,并对我国声表面波用基片材料的发展进行了展望.

参考文献

[1] 许昌昆;孟秀林;林江.声表面波器件及应用[M].北京:科学出版社,1984
[2] Shi Jifan;Wang Jun;Xu Yibin.[A].,1995:667-669.
[3] Otsuka K;Funami M;Ito M et al.[J].Japanese Journal of Applied Physics,1995,34:2646-2649.
[4] 周亚栋;何先莉 .[J].压电与声光,1996,18(01):67-69.
[5] J -W Soh;S -S Jand;I -S Jeong .[J].Thin Solid Films,1996,279:17.
[6] B Aspar;R Rodriguez .[J].Journal of Crystal Growth,1993,129:56.
[7] J Meng;G L Doll .[J].Journal of Applied Physics,1996,79:1788.
[8] K Kaya;H Takahashi;Y Shibata .[J].Japanese Journal of Applied Physics,1997,36:307.
[9] H -C Lee;K Lee;Y -J Yong .[J].Thin Solid Films,1995,271:50.
[10] H. L. Kao;P. J. Shih;Chun-Hsi Lai .The Study of Preferred Orientation Growth of Aluminum Nitride Thin Films on Ceramic and Glass Substrates[J].Japanese journal of applied physics,1999(3A Pt.1):1526-1529.
[11] Kim Jinwoo;Kang Kwang Yong;Lee Su Jae et al.[J].Ungyong Mulli,1998,11(05):620-624.
[12] Vadim Lebedev;Bernd Schrter;Gela Kipshidze et al.[J].Journal of Crystal Growth,1999,207:266-272.
[13] 黄继颇,王连卫,祝向荣,多新中,林成鲁.脉冲激光沉积制备c轴取向AlN薄膜[J].压电与声光,1999(05):387-389.
[14] M Kasuga;M Mochizuki;K Kobayashi et al.[J].Japanese Journal of Applied Physics,1980,19:2289.
[15] M Kasuga;M Mochizuki .[J].Journal of Crystal Growth,1981,54:185.
[16] Y Igasaki .[J].Journal of Crystal Growth,1992,116:357.
[17] S Goto;N Gujimura;T Nishihara et al.[J].Journal of Crystal Growth,1991,115:816-820.
[18] H Sankur;J T Cheung .[J].Journal of Vacuum Science and Technology,1983,A1(04):1806.
[19] N J Ianno;L Mcconville;N Shaikh et al.[J].Thin Solid Films,1992,220:92-99.
[20] N.W.Emanetoglu;S.Liang;C.Gorla.[A].,1997:195.
[21] V Srikant;Valter Sergo;David R Clarke .[J].Journal of the American Ceramic Society,1995,78(07):1931.
[22] Shikata;Shin-ichi.Low-Pressure Synth.Diamond[M].NewYork:Dischler,1998
[23] Yang Hyung;Park Jong Chul;Lee Yong Eui.Int.Ceram.Monogr.2(Proceedings of the second international meeting of pacific rim ceramic societies,1996)[C].,1996:1564-1570.
[24] Nakahata;Hideak Higaki;薛泉林.[J].电子陶瓷参考,1999(02):1-4.
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