采用电泳沉积技术在Pt电极基片上制备BaTiO3铁电陶瓷薄膜.探讨了电泳沉积过程中的控制因素(悬浮液体系、电场强度、料浆浓度、沉积时间等)对成膜性能的影响,并对薄膜材料的结构、性能进行了表征.实验结果表明:在1050℃(2h)的烧成温度下,经重复沉积-烧结2～3次可得到基本无缺陷的BaTiO3陶瓷薄膜.测量频率在1kHz时,室温(23℃)下的介电常数ε＝2300,介电损耗tanδ＝0.2.
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