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硅酸盐通报 , 2002, 21(6): 58-62. doi: 10.3969/j.issn.1001-1625.2002.06.012

水热法制备薄膜技术

黄晖 1, , 苗鸿雁 2, , 罗宏杰 3, , 姚熹 4,

1.西安交通大学电子材料研究所,西安,710049

2.陕西科技大学材料工程系,咸阳,712081

3.陕西科技大学材料工程系,咸阳,712081

4.西安交通大学电子材料研究所,西安,710049

基金项目:   国家杰出青年科学基金(50025208)  

关键词： 水热法 , 水热技术 , 薄膜

Thin Films derived from Hydrothermal Technique

水热法制备薄膜是近年来发展起来的一种很有潜力的液相制膜技术,在制备压电、铁电和氧化物薄膜等领域内的研究很活跃.本文介绍了水热法制备薄摸技术,并综述了相关的研究成果.

参考文献

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