综述了各种无机薄膜的基本制备方法,并对目前国内外的一些新的薄膜制备方法和应用的最新进展进行了概述,分别介绍了物理方法、化学方法及溶胶-凝胶法(Sol-gel)的基本特点及成膜特性,同时对今后薄膜制备领域的前景进行了展望.
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