热等离子体雾态气化制备薄膜技术(mist plasma evaporation, MPE)以液态源物质溶液为先体,采用超声雾化将先体溶液雾化为细小液滴,用载气将雾化液滴输运到射频感应热等离子体中,利用热等离子体的超高温,将液滴中的源物质彻底气化和分解为其组分粒子,通过气相输运,最终在基片上沉积薄膜.MPE制备薄膜技术采用单一先体溶液,源物质来源广泛,沉积速率快,不需后续热处理.本文介绍了MPE制备薄膜技术原理及工艺,综述了近年来在制备薄膜方面的研究进展.
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