研究了微量元素铋对Sr0.5Ba0.5-xBixTiO3薄膜介电性能的影响.当X分别为0~0.030 mol时,相对介电常数εr、介质损耗tanδ逐渐降低,最大介电常数温度点Tm(居里温度点)逐渐移向低温;在所测试频率范围内,εr、tanδ均能表现出较好的频散特性;当铋掺量为0.015mol时,薄膜的Pr为0.22μC/cm2、Ps为0.32μC/cm2、Ec为60kV/cm.采用XRD、FTIR、TEM等测试方法分析了薄膜的结构特征.薄膜的矿物组成为四方钙钛矿结构,但[TiO6]八面体特征吸收峰(471.65cm-1)移向低波数,晶粒粒径减小.
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