用醋酸盐和钛酸四丁酯为原料,采用sol-gel工艺在Pt/TiO/SiO/Si基片上制备了含有Mg元素的Sr0.5Ba0.5-xMgxTiO3薄膜,其退火处理温度为750℃.通过X射线衍射和扫描电镜分析技术研究了薄膜的相结构和形貌.采用美国HP Angilent 4294A阻抗分析仪测试了以Pt为底电极、Ag为上电极的MFM电容器的介电性能.实验结果表明:掺镁Sr05Ba05.xMgxTiO3薄膜较未掺杂的Ba05Sr0.5TiO3薄膜相对介电常数高、介电损耗低.介温谱表明在居里温度附近发生了弥散型相变,且居里温度有向低温方向漂移的趋势.
参考文献
| [1] | Joshi PC.;Cole MW. .Mg-doped Ba0.6Sr0.4TiO3 thin films for tunable microwave applications[J].Applied physics letters,2000(2):289-291. |
| [2] | Chang WT.;Sengupta L. .MgO-mixed Ba0.6Sr0.4TiO3 bulk ceramics and thin films for tunable microwave applications[J].Journal of Applied Physics,2002(7):3941-3946. |
| [3] | Cole M W;Joshi P C;Ervin M H et al.The influence of Mg doping on the materials properties of Ba1-x SrxTiO3 thin films for tunable device applications[J].Thin Solid Films,2000,374:34-41. |
| [4] | M. W. Cole;C. Hubbard;E. Ngo;M. Ervin;M. Wood;R. G. Geyer .Structure-property relationships in pure and acceptor-doped Ba_(1-x)Sr_(x)TiO_(3) thin films for tunable microwave device applications[J].Journal of Applied Physics,2002(1):475-483. |
| [5] | Cole M W;Nothwang W D;Hubbard C et al.Low dielectric loss and enhanced tunability of Ba0.6Sr0.4TiO3 based thin films via material compositional design and optimized film processing method[J].Journal of Applied Physics,2003,93(01):9218-9225. |
| [6] | 丁永平;金承钰;孟中岩 .(Ba,Sr)TiO3铁电薄膜的热演化特征与微结构[J].材料研究学报,1999,13(06):637-440. |
| [7] | Ding Y P;Jin C Y;Meng Z Y .Investigation on the amorphous-crystalline transition and microstructure of sol-gel derived (Ba1-x Srx) TiO3 thin films[J].Materials Research Bulletin,2000,35:1187-1193. |
| [8] | 王静,兰艳梅,王伟,杨彩琴,刘明登.溶胶-凝胶法制备BaxSr1-xTiO3铁电薄膜的研究[J].无机材料学报,2001(06):1250-1254. |
| [9] | 付兴华,侯宪钦,周丽玮,黄世峰,傅正义.Sr1-xBaxTiO3超细微粉的溶胶-凝胶制备与表征[J].硅酸盐通报,2003(01):3-7. |
| [10] | 韩建成.多晶X射线结构分析[M].上海:华东师范大学出版社,1989:155-162. |
| [11] | 王恩信,邓宏,姜斌.掺杂弛豫铁电陶瓷材料的电阻温度特性[J].电子科技大学学报,1999(02):136-140. |
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