CVD金刚石膜的抛光技术

1.北京科技大学,北京,100083

2.北京科技大学,北京,100083

3.北京科技大学,北京,100083

4.北京科技大学,北京,100083

5.北京科技大学,北京,100083

Polishing Techniques of CVD Diamond Films

高的表面粗糙度和厚度的不均匀性影响了CVD金刚石膜的应用.而抛光可以减少这些缺点近年来.发展了许多CVD金刚石膜的抛光技术.而且不同的抛光技术都有其优缺点.表文总结了CVD金刚石膜的各种抛光技术及其特点.并提出了一种新的抛光技术.

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