NiAl化合物涂层的组织及其性能研究

1.淮阴工学院机械工程系,江苏,淮阴,223001

2.淮阴工学院机械工程系,江苏,淮阴,223001

Study on Organization and Property of PVD NiAl Intermetallic Coating

介绍了一种由纯Ni和纯Al合成的特制靶材及用射频磁控溅射法沉积NiAl涂层的新工艺.试验结果表明,该NiAl涂层呈整齐的立方晶体结构,涂层厚约10μm,晶粒尺寸约10nm,且该涂层具有良好的耐磨性及与基体之间良好的粘附性.

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