蘸水笔技术(Dip-Pen)是近年来发展起来的一种新的扫描探针刻蚀加工技术,有着广泛的应用前景.该技术是直接把弯曲形水层作为媒介来转移"墨汁"分子,在样品表面形成纳米结构.尖端曲率半径、针尖在基底表面滞留时间、针尖扫描速度、空气湿度、表面粗糙度等均会影响纳米结构的线宽.针尖在基底表面滞留时间与圆半径的平方成一次函数关系,线宽随着尖端半径的增大而变宽,扫描速度与线宽成反比关系.通过控制湿度可以控制"墨水"分子的转移速度,从而影响纳米结构的线宽.线宽随着样品表面粗糙度增加而变宽.
参考文献
[1] | Rachel K. Smith;Penelope A. Lewis;Paul S. Weiss .Patterning self-assembled monolayers[J].Progress in Surface Science,2004(1/2):1-68. |
[2] | Cheol Hong Park;Sukjong Bae;Haswon Lee.Nano-oxidation of si using ac modulation in atomic force microscopy lithography[J].COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS,2006(284-285):552-555. |
[3] | Z. J. Davis;G. Abadal;O. Hansen .AFM lithography of aluminum for fabrication of nanomechanical systems[J].Ultramicroscopy,2003(1/4):467-472. |
[4] | Richard D Piner;Jin Zhu;Feng Xu et al."Dip-Pen" Nanolithography[J].Science,1999,283(29):661-663. |
[5] | Joonkyung Jang;George C. Schatz;Mark A. Ratner .Liquid meniscus condensation in dip-pen nanolithography[J].The Journal of Chemical Physics,2002(9):3875-3886. |
[6] | Jason Haaheim;Ray Eby;Mike Nelson .Dip Pen Nanolithography (DPN): process and instrument performance with NanoInk's NSCRIPTOR system[J].Ultramicroscopy,2005(2):117-132. |
[7] | Seunghun Hong;Jin Zhu;Chad A. Mirkin .Multiple Ink Nanolithography: Toward a Multiple-Pen[J].Science,1999(5439):523-525. |
[8] | 李宾,汪颖,武海萍,张益,张志祥,周星飞,李民乾,胡钧.动态组合模式"蘸笔"纳米刻蚀与单个DNA分子上的物理纳米图形制造[J].科学通报,2004(05):444-447. |
[9] | Bin Li;Yi Zhang;Jun Hu .Fabricating protein nanopatterns on a single DNA molecule with Dip-pen nanolithography[J].Ultramicroscopy,2005(1/4):312-315. |
[10] | Qian Tang;San-qiang Shi;Haitao Huang;Li Min Zhou .Fabrication of highly oriented microstructures and nanostructures of ferroelectric P(VDF-TrFE) copolymer via dip-pen nanolithography[J].Superlattices and microstructures,2004(1/3):21-29. |
[11] | Paula Gould.Lithography:rewriting the rules[J].Materialis Today,2003(05):34-39. |
[12] | Schwartz P V;Whitman L J .Capillary Force on a Nanoscale Tip in Dip-Pen Nanolithography[J].Physical Review Letters,2002,88:15-16. |
[13] | 李彦,刘杰,Maynor Ben.电化学"沾笔"纳米刻蚀及其他(英文)[J].无机化学学报,2002(01):75-78. |
[14] | Joonkyung Jang;Seounghun Hong;George C.Schatz;Mark A.Ratner .Self-assembly of ink molecules in dip-pen nanotlithography: A diffusion model[J].The Journal of Chemical Physics,2001(6):2721-2729. |
[15] | L M Demers;D S Ginger;S-J Park et al.Direct Patterning of Modiped Oligonucleotides on Metals and Insulators by Dip-Pen Nanolithography[J].Science,2002,296:1836-1838. |
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