采用脉冲激光沉积技术,在Si(100)基片上制备了BCN薄膜,研究了沉积温度和退火处理对BCN薄膜组分和结构的影响.利用傅里叶变换红外光谱(FTIR)和X射线光电子能谱(XPS)对制备的BCN薄膜进行了表征.结果表明:沉积温度升高时,BCN薄膜的组分无明显改变.所制备的BCN薄膜包含B-N,C-B和C-N化学键,是由杂化的B-C-N键构成的化合物.真空退火温度为700 ℃时,BCN薄膜结构稳定;大气退火温度达到600 ℃时,BCN薄膜表面发生氧化分解,同时有C≡N键形成,表明C≡N键具有较好的高温热稳定性.
BCN thin films were deposited on Si (100) substrates by pulsed laser deposition. The effects of deposition temperature and annealing on the film composition and structure were investigated. Fourier-transform infrared (FTIR) spectroscopy and X-ray photoelectron spectroscopy (XPS) were used to characterize the BCN thin films. The results show that deposition temperatures have little influence on film composition. FTIR and XPS analyses indicated the as-deposited BCN films contained B-C, N-C and B-N chemical bonds with B-C-N atomic hybridization. BCN thin films which annealed in vacuum at 700 ℃ were stable. When annealed in air, the samples were oxidated. Meanwhile, the formation of C≡N bond indicated that it has better thermal stability.
参考文献
| [1] | Nesladek M.;Meykens K.;Haenen K.;Manca J.;De Schepper L. Pace E.;Pini A.;Rinati GV.;Kimura C.;Etou Y.;Sugino T.;Vanecek M. .Study of UV and subgap photocurrent response in diamond and BCN thin films for detector applications[J].Physica Status Solidi, A. Applied Research,2001(1):107-113. |
| [2] | Takashi Sugino;Haruhiko Hieda .Field emission characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition[J].Diamond and Related Materials,2000(3-6):1233-1237. |
| [3] | Linss V.;Hermann I.;Schwarzer N.;Kreissig U.;Richter F. .Mechanical properties of thin films in the ternary triangle B-C-N[J].Surface & Coatings Technology,2003(0):220-226. |
| [4] | Watanabe MO.;Mizushima K.;Sasaki T.;Itoh S. .ELECTRICAL PROPERTIES OF BC2N THIN FILMS PREPARED BY CHEMICAL VAPOR DEPOSITION[J].Journal of Applied Physics,1995(4):2880-2882. |
| [5] | Lei M K;Li Q;Zhou Z F et al.Characterization and optical investigation of BCN film deposited by RF magnetron sputtering[J].Thin Solid Films,2001,389:194-199. |
| [6] | Fei Zhou;Koshi Adachi;Koji Kato .Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):210-217. |
| [7] | Y. K. Yap;Y. Wada;M. Yamaoka;M. Yoshimura;Y. Mori;T. Sasaki .Bond modification of BCN films on Ni substrate[J].Diamond and Related Materials,2001(3 Pt.3):1137-1141. |
| [8] | Barr T L;Seal S .Nature of the use of adventitious carbon as a binding energy standard[J].Journal of Vacuum Science and Technology A:Vacuum Surfaces and Films,1995,13(03):1239-1246. |
| [9] | 王玉新,郑亚茹,宋哲,冯克成,赵永年.FTIR法研究BCN薄膜的内应力[J].光谱学与光谱分析,2008(07):1526-1529. |
| [10] | Eungsun Byon;Myungsook Son;Koo-Hyun Lee;Kee-Seok Nam;Nobuyoshi Hara;Katsuhisa Sugimoto .Electrochemical properties of boron-carbon-nitride films formed by magnetron sputtering[J].Electrochimica Acta,2006(13):2662-2668. |
| [11] | Künzli H;Gantenbein P;Steiner R et al.Deposition and characterization of thin boron-carbide coatings[J].Fresenius'Journal of Analytical Chemistry,1993,346:41-44. |
| [12] | Kim SY;Park J;Choi HC;Ahn JP;Hou JQ;Kang HS .X-ray photoelectron spectroscopy and first principles calculation of BCN nanotubes[J].Journal of the American Chemical Society,2007(6):1705-1716. |
| [13] | Hidemitsu Aoki;Takuro Masuzumi;Daisuke Watanabe;M.K. Mazumder;Hiroshi Sota;Chiharu Kimura;Takashi Sugino .Influence Of Oxygen Plasma Treatment On Boron Carbon Nitride Film Composition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2009(6):3635-3638. |
| [14] | Hiroshi Sota;Naoyoshi Komatsu;Kentaro Chikamatsu .Optical and electrical properties of boron nitride oxide films[J].Diamond and Related Materials,2008(4/5):826-829. |
| [15] | V.Suthar;A.Pratap .Studies on poly (hydroxy alkanoates)/(ethylcellulose) blends[J].Bulletin of Materials Science,2000(3):215-219. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%