采用射频磁控溅射技术制备Sb2O3/CeO2共掺杂ZnO薄膜,研究了薄膜的结构及紫外光吸收性能.结果表明:Sb2O3和CeO2共同掺入ZnO薄膜后,ZnO(002)晶面的XRD衍射峰强度明显下降,ZnO薄膜呈混晶方式生长；共掺杂ZnO薄膜的紫外吸收性能明显优于纯ZnO薄膜,Sb对掺杂ZnO薄膜的结构和紫外吸收性能的影响起主导作用,Ce起进一步的强化作用.
参考文献
| [1] | E. M. Bachari;G. Baud;S. Ben Amor;M. Jacquet .Structural and optical properties of sputtered ZnO films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(1/2):165-172. |
| [2] | INUKAI T;MATSUOKA M;ONO K .Characteristics of Zinc Oxide Thin Films Prepared by R.F.Magneronmode Electron Cyclotron Resonance Sputtering[J].THIN SOLID FILMS,2005,257:22-27. |
| [3] | R. Ondo-Ndong;G. Ferblantier;M. Al Kalfioui;A. Boyer;A. Foucaran .Properties of RF magnetron sputtered zinc oxide thin films[J].Journal of Crystal Growth,2003(1/2):130-135. |
| [4] | Molarius J.;Kaitila J.;Pensala T.;Ylilammi M. .Piezoelectric ZnO films by r.f. sputtering[J].Journal of Materials Science. Materials in Electronics,2003(5/7):431-435. |
| [5] | HORIO N;HIRAMATSU M;YOKO T .Application of Zinc Oxide Varistors[J].Journal of the American Ceramic Society,2003,81(06):1622-1632. |
| [6] | HUANG Ya-niu;LIU Mei-dong;ZENG Yi-ke et al.Electrical and Optical Properties of Zinc Oxide Films Postannealed in H2 after Abrication by Sol-gel Process[J].Materials Science and Engineering B:Solid-state materials for advanced technology,2001,86:232-236. |
| [7] | 吕建国,叶志镇.ZnO薄膜的最新研究进展[J].功能材料,2002(06):581-583,587. |
| [8] | 黄焱球,刘梅冬,李珍,曾亦可.氧化锌薄膜的拉曼光谱研究[J].功能材料,2002(06):653-655. |
| [9] | 井立强,孙晓君,郑大方,徐跃,李万程,蔡伟民.ZnO超微粒子的量子尺寸效应和光催化性能[J].哈尔滨工业大学学报,2001(03):344-348. |
| [10] | 徐芸芸,张韬,徐新,李争鸣.CeO2掺杂ZnO薄膜制备和紫外吸收性能[J].科技导报,2010(21):26-29. |
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