用微等离子体氧化法制备出纯相的BaTiO3陶瓷膜,对所得的陶瓷膜进行XRD和EPMA分析.结果表明,膜层中钡钛两种元素分布均匀,无浓度梯度变化.结合实验现象和测试结果,探讨了浓度和电流密度对陶瓷膜的影响,并提出了BaTiO3陶瓷膜成膜过程中的可能反应机制过程.
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