用CaF2和YF3做添加剂,在1750℃制备了热导率高于170W/m.K的AlN陶瓷,并用XRD和SEM研究了AlN陶瓷在烧结过程中的相组成、微结构以及晶格参数的变化,并讨论了其对热导率的影响.研究发现,当使用CaF2-YF3做添加剂时,微结构差异对AlN陶瓷热导率的影响很小,AlN陶瓷的热导率主要由AlN晶格氧缺陷浓度决定.由于CaF2-YF3能有效降低AlN颗粒表面的氧含量,从而有利于获得高的热导率.
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