研究了磁控溅射和电子束蒸镀工艺对在LiNbO3基片上沉积铝膜的结构、表面形貌的影响.采用匀胶、曝光和反应离子刻蚀工艺,制备出中心频率在920MHz纵向谐振耦合换能器结构的声表面波滤波器.结果表明,电子束蒸镀的铝膜与LiNbO3单晶间具有较好的结合力,具有适合SAWF器件制备所需的微观结构,在随后的叉指换能器制备过程中表现出良好的加工性能和声传播特性.
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