评述了金刚石的高温失效机制,介绍了几种正在研究与发展的用于金刚石的高温抗氧化光学涂层,如氮化铝涂层、氧化钇涂层等.提出了对应用于高温高速环境的金刚石涂层今后需要进一步研究的关键问题.
参考文献
| [1] | 李敬起;郭晚土;孙亦宁 .金刚石红外增透保护膜[J].真空与低温,1996,9(03):131-133. |
| [2] | DANIELCHARRIS.Properties of diamond for window and do-me applications[A].Washington:SPIE Press,1994:218-228. |
| [3] | KLEMMKA;PATTERSON H S;JOHNSON L F.Pro-tective optical coatings for diamond infrared windows[A].Washington:SPIE Press,1994:347-356. |
| [4] | DANIELCHARRIS.Materials for infrared windows and domes[M].Washington:SPIEOpticalEngineeringPress,1999:335. |
| [5] | CURTISEJOHNSON;JEAN M BENNETT;MELVIN P NADLER.Oxidative degradation of CVD diamond[A].Washington:SPIE Press,1994:247-253. |
| [6] | 刘敬明,唐伟忠,吕反修.高质量CVD金刚石膜的氧化损伤[J].人工晶体学报,2001(02):167-170. |
| [7] | 张伟,张仕国,袁骏.Si衬底上用反应蒸发法制备AlN单晶薄膜[J].半导体学报,1997(08):568. |
| [8] | MCGEOCHSP.Aluminum nitride coatings for protection of diamond at high temperature in air[A].Washington:SPIE Press,1999:163-169. |
| [9] | McGeoch S.P. .Coatings for the protection of diamond in high-temperature environments[J].Diamond and Related Materials,1999(2 Mar):916-919. |
| [10] | HOLMQUIST;GLENN A .Oxidation resistant diamond composite and method of forming the same[P].US 5421976 |
| [11] | LINDAFJOHNSON;KARL A KLEMM et al.Anti-reflection and anti-oxidation coatings for diamond[P].US:5472787 |
| [12] | GRANNENKJ;TSU D V;MELIUNAS R J et al.Oxidationstudiesoffluorinecontainingdiamondfilms[J].Applied Physics Letters,1991,59(06):745-747. |
| [13] | MIYATAK;KOBASHI K.AiroxidationofundopedandB-dopedpolycrystallinediamondfilmsathightemperature[J].Journal of Materials Research,1996(11):296-305. |
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