分别对溶胶-凝胶法和磁控溅射法制备ZnO进行了详细的介绍,并借助X射线衍射、原子力显微镜、拉曼光谱分析、紫外吸收等检测手段对这两种方法生长的薄膜进行了分析比较.分析显示:相同石英基底,相同退火温度下生长ZnO薄膜,磁控溅射法生长的ZnO薄膜要比溶胶-凝胶法生长的ZnO薄膜有更优异的c轴取向特性,生长的薄膜结晶更加均匀、致密.
参考文献
| [1] | Won Taeg Lim;Chang Hyo Lee .Highly oriented ZnO thin films deposited on Ru/Si substrates[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):12-15. |
| [2] | Makino T.;Chia CH.;Segawa Y.;Kawasaki M.;Ohtomo A.;Tamura K. Matsumoto Y.;Koinuma H. .High-throughput optical characterization for the development of a ZnO-based ultraviolet semiconductor-laser[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(3/4):277-283. |
| [3] | KAMALASANANMN;CHANDRA SUBHAS .Sol-gelsynthesisofZnOthinfilms[J].Thin Solid Films,1996,288:112-115. |
| [4] | JINJ;WOOHS;IMS SHBAE et al.RelationshipbetweenphotoluminescenceandelectricalpropertiesofZnOthinfilmsgrownbypulsedlaserdeposion[J].Applied Surface Science,2001,169:521-524. |
| [5] | G. W. Bao;S. F. Y. Li .Characterization of atomic force microscopy (AFM) tip shapes by scanning hydrothermally deposited ZnO thin films[J].Talanta: The International Journal of Pure and Applied Analytical Chemistry,1998(4):751-757. |
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