考察了TiN/Ti多层膜韧性对其摩擦学性能的影响.采用磁过滤阴极弧沉积的方法制备了具有不同Ti子层厚度的TiN/Ti多层膜.用透射电镜对其层状结构及子层厚度进行了观察和分析,分别用Rockwell硬度计和UMT摩擦磨损试验机,进行了压痕测试和摩擦磨损实验.结果表明,TiN/Ti多层膜中Ti子层的加人显著提高了多层膜的韧性,相对TiN单层薄膜,当载荷较大时,多层膜的耐磨性有明显的改善.结合实验结果,讨论了TiN/Ti多层膜韧性对其耐磨性的影响.
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